超精密机床伺服系统双模控制器的设计

摘要

提出了超精密机床伺服系统的双模控制方法，开发出基于该方法的新型闭环位置控制系统。该方法在不改变原有的控制器结构的基础上，可以有效地补偿由于动静摩擦所引起的执行机构死区非线性作用的影响，因此实现比较简单。实验证明，系统在低速跟踪时，采用该方法实现了最大跟踪误差小于±0.1μm。%The two mode control method is presented for the servo system ofprecision machine tool and the new closed position control system based on that method is developed. This method can compensate for the effect of actuator's non-linear dead zone subjected to two kind of friction without changing the configuration of original controller, so it is easy to be implemented. By applying the control method to the practical system, the maximum trace error remains under ±10μm in the closed-loop positioning system.