利用电磁场有限元分析进行超快刀具伺服机构设计

摘要

Fast tool servo system is one of the important approaches to manufacture optical free form surfaces.The conventional linear tool servos have a problem of low frequency response, which limits the complexity of the manufactured surfaces.Explores the principle of the electromagnetic servo,analyzes and calculates the maximum driving force and frequency response with FEA method,which proves the servo using this kind of driving method can realize high frequency response.The structure and material of the motor were optimized and the power of the motor is designed.The experiment of the optimized motor is conducted to show the maximum frequency response is 10.1kHz,and the stroke is 13μm.%快速刀具伺服系统足光学复杂面形加工的重要手段,现有直线伺服机构在原理上存在频响低的问题,严重限制被加工面形的复杂程度.分析电磁正应力驱动伺服机构的基本原理,利用有限元分析原理计算伺服机构的最大驱动力和最高频响,证明该方式驱动的伺服机构可以实现高频响应.根据有限元分析结论改善伺服机构的机械结构及选材,并设计伺服机构驱动器.实验研究优化设计的伺服机构响应频率为10.lkHz,工作行程为13μm.