角度误差对空气轴承径向回转误差测量的影响规律研究

摘要

在超精密空气轴承径向回转误差测量中,测量系统中带入的角度误差不能忽略.为此,详细分析了反向法下角度误差对测量结果的影响规律,并对测量系统制造、装配和数据采集过程进行了控制,在此基础上完成了径向回转误差测量实验.结果表明:通过对角度误差源的有效控制,所构建的测量系统能够很好地完成100 nm以内量级径向回转误差的测量,测量结果的一致性较好,所分离出标准球圆度误差与标称值吻合.%In the measurement of radial motion error of air bearing,the angle error of measurement system shouldn't be neglected.Based on reversal,this paper demonstrated the influence of angle error,and the measurement system's manufacture,assembly,data collection were controlled.The experimental results show that 100 nm radial motion error and roundness error of reference artefact(test ball) can be reliably and repeatably resolved in the measurement system.