大口径高精度液体静压转台研制

摘要

介绍了一种用于大口径非球面镜超精密数控磨床的高精度液体静压转台部件,通过工艺可行性分析和精度传递模型给出了优化的转台结构;采用数值列举法给出了径向和轴向刚度与油膜厚度的设计参数;为考察油膜压力作用下零件变形对转台刚度的影响,采用流固耦合分析方法对零件的强度进行了校核;利用直径为40 mm,圆度为0.05 μm的标准球和电感测微仪对回转工作台的径向和轴向跳动进行了测试试验,得到回转工作台轴向和径向误差均小于0.5μm.%large and high precision hydrostatic rotary table for the large aspheric mirror ultra precision NC grinding machine was present by this paper.Through the specimen manufacture feasibility and accuracy transformation model,the optimized structure of the rotary table was proposed.Design parameters of the oil gap size and stiffness was verified according to the discrete value list method.In order to investigate the effects of the high pressure oil towards the table deformation,fluid solid coupling method was used to verify the specimen's strength.40mm diameter standard sphere of 0.05 μm runout error was used to test the radial and axial runout value of the developed hydrostatic rotary table,the measurement indicated that both the radial and axial runout is less than 0.5 μm.