钯铬合金电阻氢气传感器研究

摘要

采用钯铬合金作为氢敏材料，利用离子柬技术制备薄膜式氢气传感器。测试了传感器对0-4%浓度范围氢气的敏感特性，结果显示，传感器对0-4％氢气浓度具有良好的线性输出特性，并表现出较高的响应灵敏度和较好的响应重复性，传感器响应信号相对强度随着温度升高减小，传感器响应时间随着温度升高而减小。%A thin film hydrogen sensor using Pd/Cr alloy as sensing materials is prepared with ion beam technology. Testing results indicate that this hydrogen sensor has a pretty good linear output performance to a 0-4% density of hydrogen detection, and demonstrates a high responsiveness and repeatability. The strength of the responsive signal of the sensor decreases while the temperature increases, and its responsive time shortened as the temperature increases.