长环形驻波直线超声电机振子有限元分析水

摘要

A long ring vibrator of standing wave ultrasonic motor is presented it and is studied. With FEM software,the working mode of the vibrator is analyzed,which reveals the working principle of the vibrator. Numerical analysis for supporting structure and the structure parameters which affect the intrinsic frequency of vibrator's vibrating mode is conducted;hence ,the structure of the vibrator is determined.There are two contact surfaces of the vibrator,which are connected to the support parts by flexure hinges and works by utilizing a pair of incurved modes of the eighteenth orthogonal to realize bi-contact surfaces driving of the vibrator with forward and backward movement. It is proved that with in-plane bending mode of vibration,ring type vibrator may accomplish bi-contact surfaces driving and forward-backward linear movement. Therefore ,theoretical reference for the designing of linear movement standing wave ultrasonic motor with ring type vibrator is provided.%提出了一种长环形直线驻波超声电机振子,并对该超声电机振子进行了研究.利用有限元分析软件对振子的工作模态进行了分析,阐述了振子的工作原理.对支撑结构、影响振子振动模态固有频率的主要结构参数,进行了数值分析,确定了振子的结构形式.振子与支撑结构采用柔性铰链连接,利用第18阶正交的两个面内弯曲模态工作,实现了电机振子双接触面驱动、正反两个方向运动.证明了该类振子利用面内弯曲振动模态可以实现双面驱动、正反双向直线运动.为环型驻波直线超声电机的设计提供了理论参考.