多微通道式气体静压节流器的设计与分析

摘要

节流器是气体静压系统的关键零部件之一.设计并加工了一种止推用多微通道式气体静压节流器,利用电容式测微基本原理对其气膜厚度进行测量.建立了该节流器电容值-气膜厚度的数学模型,计算了特定气膜厚度值时的电容值,利用电容测量仪及电感测微测头对外径80mm的多微通道式气体静压节流器产生的气膜厚度进行了测量,最终对实验误差进行处理分析.实验结果表明,理论值与实测数据之间误差小于13％,证明了数学模型的正确性,也反映了电容式测微方法测量气体静压系统气膜厚度的有效性.%Restrictors are one of core parts in aerostatic systems.A special multi-microchannel aerostatic restrictor is designed and developed, and the air film thickness is measured by the capacitive measuring method.The mathematical model of capacitance and air film thickness carried out,capacitances of specific air film thickness calculated,air film thickness of the multi-microchannel aerostatic restrictor with' the overall diameter measured, and error sources processed and analyzed. Re suits illustrate that errors between the theoretical calculations and the experimental data are less than 13%,which proves the correctness of the mathematical model as well as the effectiveness of the capacitive measuring method applying for the air film thickness measurement of the aerostatic systems.