The property of shape memory alloy (SMA) is stated. SMA actuatorshave many advantages, such as compact structure, big power-to-weight ratio and easy control. In this paper, a pneumatic microvalve with SMA actuator is developed, and can be integrated with microrobot. The application of SMA actuator has promoted the development of microrobot.%本文阐述了形状记忆合金的特性,形状记忆合金作为驱动元件,具有结构紧凑、功率重量比大、易控制等优点,大大推动了微型机器人的发展。本课题利用形状记忆合金作为驱动元件,开发了微型气动阀,实现了与微机器人主体的集成。
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