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大平面长平面精密研磨技术研究

         

摘要

对包括温度、振动等精密、超精密研磨的环境支撑条件进行了实验与分析,指出精密研磨中研具、研磨剂选择应注意的事项,提出基于检测与研磨相互循环的大平面、长平面精密研磨方法,获得了稳定的000级1 000 mm ×630 mm×150 mm大理石平板研磨水平.%The environmental conditions of ultra precise grinding, including temperature, vibration and so on, were tested and analyzed. Notices about selection of lapper and abrasive used in ultra precise grinding were pointed out. The grinding method for big and large plane based on cycle of test and grinding was presented. The stable 000 grinding level for the marble flat, which dimension is 1 000 mm ×630 mm × 150 mm, is gotten by using this method.

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