常用间隔层材料软X射线多层膜的设计

摘要

To study the material commonly used in the interval of soft X-ray multilayer, soft X-ray multilayer with high reflectivity were designed with the special design program prepared by the Lawrence-Livermore National Laboratory. The results show that Molybdenum has good optical property in a wide waveband. Besides at optimum wavelength of 12.44nm, molybdenum has high reflectivity at other wavelengths except 4.36nm. Multilayer consisting of uranium and other spacing layer material, with uranium as an absorption layer, also has higher reflectivity in a large wavelength range. The results are helpful for selection of multilayer material.%为了研究常用间隔层材料的软x射线多层膜的材料设计,利用Lawrence-Livermore国家实验室提供的软X射线多层膜设计程序进行模拟计算,得到了软X射线波段内的具有高反射率的膜系.结果表明,Mo在相当大的波段范围内具有良好的光学特性;除了在12.44nm是首选膜系外(除4.36nm外),其它波长都有较高的反射率;U作为吸收层材料,在相当大的波段范围内,与其它间隔层材料配对的多层膜也具有较高的反射率.这对多层膜膜系的材料选择有一定的指导意义.