基于显微视觉的光纤阵列精密测量研究

摘要

A precision method for measuring accurately the core pitch of fiber array (FA)is reported,which can be broadly used in optical communication systems and distributed fiber sensor network.The measurement system mainly consists of a white light source,a precision stage,a microscope,a CCD and a computer.The image comprising at least two fiber cores is acquired.The edge of the fiber core is extracted at sub-pixel level through quadric polynomial inter-polation method and the center is located through least square method.Experimental results indicate that,the fiber pitch can be measured with a resolution of 16nm and a standard deviation of 23nm.This method can realize the auto-mation,non-contact,high precision measurement of fiber array spacing.%光纤阵列是一种广泛应用于光纤通信系统和光纤传感网络中的光学器件，其纤芯位置误差严重影响器件的耦合效率，有必要进行精密检测。论文研究一种基于显微视觉技术的光纤阵列精密测量方法。采用数字显微系统获取包含至少两根光纤像斑的图像，通过二次多项式插值法实现光纤光斑边缘的亚像素级提取，利用最小二乘拟合法对光斑中心精确定位，从而计算出两根光纤之间的纤芯距。系统测量分辨率为16 nm，重复测量标准差为23 nm。该方法可实现光纤阵列间距的自动化、非接触、高精度测量。