基于温漂补偿的高温电涡流位移传感器

摘要

介绍能够工作于20～500℃高温环境下的电涡流位移传感器。通过对传感器探头材料的选择与结构的改进，使传感器探头能够适应环境温度的剧烈变化；利用恒频调幅电路与峰值检测电路，完成位移信号至电压信号的基本转换；通过在传感器输出级加入温度补偿电路，分别针对灵敏度与电压基值进行补偿，实现了对温度影响的有效抑制。在设计的实验硬件系统中对传感器的输出特性进行测量，实验结果验证了该电涡流位移传感器在20～500℃的温度环境内具有良好的灵敏度与线性度，并且具有有效的温漂抑制特性。%A novel high‐temperature eddy current displacement sensor operating from 20 ℃ to 500 ℃ was introduced .The application of new materials and structure improvement of the sensor probe promised the adaptation of sensor probe to severe temperature variation . T he convention of detected displacement to electric signal was completed by frequency modulation circuit and peak detection circuit .The temperature drift ,consisting of output sensitivity and bias voltage ,was eliminated by a temperature‐compensation circuit added in the output stage of the sensor . Experimental results verified that the designed high‐temperature eddy current displacement sensor had good output sensitivity and linearity within temperature variation from 20 ℃ to 500 ℃ ,with effective temperature drift eliminating properties .