掺铝氧化锌复合粉体制备工艺对靶材性能的影响

摘要

以Zn(NO3)2·6H2O、Al(NO3)3·9H2O为前驱体,柠檬酸为络合剂,采用溶胶-凝胶法制备了掺铝氧化锌复合粉体,并通过普通烧结制备出掺铝氧化锌靶材,对制备的靶材进行测试试验,结果表明:采用两倍于金属离子摩尔浓度的柠檬酸为络合剂、pH为7.2、干燥温度为90℃时,所制备靶材的致密度及电学性能有较优值,与固相反应法相比,该靶材的性能更好,成分更均匀.%In this study, Al-ZnO composite ceramic powders were synthesized by sol-gel route, and taking Zn( NO3 )2 · 6H2O and Al( NO3 )3 · 9H2O as precursors and citric acid as complexing agent, Al-ZnO ceramic targets were prepared by ordinary sintering method.The results indicate that the targets have the optimal value of relative density and resistivity when the molar ratio of citric acid to metal ions is 2:1, the pH value is about 7.2 and the drying temperature is 90 ℃.The targets prepared by sol-gel route have better composition uniformity and properties than by solid reaction method.