高温半导体压力传感器技术

摘要

The application and the development of high temperaturesemiconductor pressure sensor are overviewed. Its principle, key techniques, and the characteristics are compared and discussed, with emphasis on the introduction of some new types of SiC high temperature pressure sensor.%介绍了高温半导体压力传感器的应用和国内外研究发展现状，论述了几种主要的高温半导体压力传感器的工作原理和关键技术，比较了不同传感器结构和制作工艺之间的优缺点，重点介绍了新型SiC高温压力传感器．