大尺寸光学零件磁流变抛光的面形缺陷研究

摘要

The reasons and solutions of surface defects of large size optical parts of magnetorheological polish are discussed. The polishing process is studied and improved, calibrating the coaxiality of the polishing head, the shaft and the axis of the workpiece, and adjusting the adequate magnetic field strength. The experimental results show that using the optimal magnetorheological polishing devices with magnetic control voltage 12 V,intial surface P-V value 0. 730 2 μm of a K9 glass of dameter 230 mm reaches 0. 3515 μm.%针对大尺寸光学零件磁流变抛光中出现面形缺陷的产生原因和解决方法进行探讨.通过调整抛光头轴心与工件轴中心及摆臂轴心必须在同一直线,及调整磁场强度的工艺,研究了改善面形缺陷提高面形质量的实验方法.实验结果表明:对Φ230mm的K9玻璃进行磁流变抛光,采用优化的磁流变抛光装置并将磁场控制电压减小到12V时,加工工件表面的面形P-V值由原来的0.7302μm提高到了0.3515μm.