数字全息显微术应用于微器件的测量研究

摘要

The method of digital holographic microscopy measurement is applied for measuring micro device to realize tiny deformation or displacement measurement ,which then is used for feedback regulation to achieve the effect of real-time monitoring .Basic theories of digital micro-holography are first described ,and a digital micro-holography measurement system without pre-amplification is established to measure tiny object such as MEMS micro devices . Based on Fresnel approximation algorithm of numerical reconstruction ,the program of digital holography reconstruction is compiled . Combined with spectral filtering method ,the zero order term and twin image ,which seriously affect the quality of hologram , are eliminated ,then a desired reconstruction image is made . At last the reproduction of three-dimensional contour ,with 160 nm groove depth and 430 μm grating pitch ,is obtained .%利用数字全息显微测量的方法进行微器件测量，以实现微小形变或者微小位移的测量，继而进行反馈调节，实现实时监测。在学习数字全息的基本理论的基础上，建立无预放大数字全息显微测量系统，对MEMS微器件进行测量。基于菲涅耳近似的再现算法编写了数字全息再现的程序，用频谱滤波的方法对全息图中对图像质量有严重影响的零级项、孪生像进行了有效的抑制，从而使成像质量得到提高，最终获得了其再现三维轮廓，刻槽深度为160 nm ，栅距为430μm 。