微位移的直射式激光三角法精密测量

摘要

为适应生产中的非接触实时测量要求,基于直射式激光三角法测量原理和光路结构,提出了微位移直射式激光三角精确测量方法.使用位移传感器(Position Sensors Detector, PSD)来采集光点位置信息,通过电流/电压转换电路、放大电路、滤波电路和 A/D模数转换电路,实现了模拟信号到数字信号的转化和测距系统误差的校正.结果表明:测量距离为10~100 mm时,全量程范围内测量误差小于3%;测量误差来源于系统中电子元器件的非线性特性、安装调试干扰、测量标定误差以及环境温度干扰.%For the non-contact real-time measurement,a measurement method of direct laser triangulation with micro displacement was proposed based on the principle and optical path of the direct laser triangulation.The position information of light spots was collected by a displacement sensor.The conversion from analog signals to digital signals and the calibration of ranging system errors were completed by an I/V conversion circuit,an amplifying circuit,a filter circuit and an A/D conversion circuit.The results show that when the distance is within 10~100 mm,the full range measurement error is less than 3 %.The measurement errors result from the nonlinear characteristics of electronic components in the system,installation and debugging,the measurement of calibration errors and ambient temperature.