频闪动态干涉法测量离面位移的研究

摘要

频闪视觉测量和频闪干涉测量代表了目前先进的微机电系统动态测试技术,尤其在非接触无损测量技术有重要意义.通过微机电三维静动态测试系统,综合运用等厚干涉原理和基片曲率法,实时测量,计算出镀膜样品在升温和退火过程中应力的变化.结果表明,该方法适合测量微机电器件的离面位移.%The experiment was used MEMS (microelectromechanical systems) and demonstrate its capabilities, in which stroboscopic imaging, micro-interferometer, computer microvision were applied.The method can be used in measure environments which need no touch and no damage. Interference of equal thickness and substrate curvature method were applied to analyse motions. The stree history of thin film measurement was performed during heating and annealing. The results showed that this method can be used to measure in-plane-rigid-body motion of microelectromechanical systems.