非对称大惯量刚性磁悬浮高速转子陀螺效应自适应抑制方法研究

摘要

针对磁悬浮分子泵中非对称大惯量刚性磁悬浮转子高速运行时出现的涡动模态失稳的问题，建立了非对称刚性转子的动力学模型，并提出了一种针对非对称转子的转速自适应的多通道单边滤波 PIDC 控制方法，在不同的转速段内自动切换反馈通道，通过优化预调参数对转子远离质心一端出现的涡动模态失稳的现象进行相位补偿，仿真结果表明，这种 PIDC 控制算法简单易用，可以有效解决高速下陀螺效应导致的转子一端进动和章动模态失稳的问题。通过实验验证了该方法的可靠性，分子泵样机平稳升速到21000 r／min，样机达到了设计真空性能指标。%A dynamic model for rigid asymmetric rotors was established for investigating the vortex mode instability of a high speed unilateral rigid rotor with large inertia under rigid asymmetric magnetic suspensions.Meanwhile,a speed-adaptive multi-channel unilateral filtering PIDC control method was presented,which can compensate the phase of the instability of vortex motion at the end away from the rotor centroid by switching over feedback channels automatically for different rotational speed to optimize the preset parameters.The simulation results show that this easily-used method of PIDC control can effectively resolve the instability of precession and nutation modes at one end of the rotor which is caused by gyroscopic effect of the rotor at high speed.Experiments verify the reliability of the method:the prototype of a molecular pump can smoothly achieve the design specification of vacuum performance,when the speed is increased to 21 000 r/min.