计算VLSI电容方法的研究

摘要

In this paper, the methods to calculate the capacitancecoefficients in VLSI circuits are discussed, which are classified as formula method and numerical method. The latter includes the finite difference method (FDM), the finite element method (FEM), the boundary element method (BEM) and the Green(s Function method, etc. The theories, advantages and disadvantages of the methods are analyzed, respectively.%讨论了几种VLSI版图中电容的计算方法；计算集成电路电容的方法有公式法和数值法两大类。利用数值法计算电容的方法包含有限差分法、有限元法、边界元法和格林法等，分析了以上各种方法的计算原理和优缺点。