扫描电子显微镜的扫描电路研制

摘要

A scan signal generator for scanning electron microscope is designed based on high speed,low noise digital to analog converter. The scan rate is up to 10 pixels per second. The influence of circuit noise on image resolution is discussed. A method of correcting the current nonlinearity caused by the scanning coil inductance is presented- The developed scanning circuit has been used into the scanning electron microscope DXP - 10 and there are good images have been generated.%报导了采用高速、高精度、低噪声的数模转换器设计扫描电子显微镜的扫描电路,其扫描速率可达到每秒106像素,讨论了电路中的噪声对图像分辨率的影响,提出了一种矫正扫描线圈电感所引起的电流非线性的方法,应用到扫描电子显微镜DXP-10中,得到了较好的扫描图像.