合金薄膜高温压力传感器研究进展

摘要

The alloy thin-film pressure sensor has overcome the shortcomings of stickup pressure sensor,has more excellent performances and is suitble for harsh environments.The working principle of the alloy thin-film pressure senso is introduced in this paper.The advantages and disadvantages of several pressure sensors are compared.Taking the sensor＇s working temperature as an assessment index,the characteristics and development status of nickel-chromium（NiCr）,platinum-tungsten （PtW） and palladium-chromium（PdCr） thin-film pressure sensors are elaborated.The conclusions are： NiCr thin-film pressure sensor is suitable for pressure measurement in the range of-269℃~ ＋350℃;PtW and PdCr thin-film pressure sensors are applied to pressure measurement at high temperature.The key technology and the application of alloy thin-film pressure sensor are reviewed.%合金薄膜压力传感器克服了粘贴式应变压力传感器的缺点,性能更优良,适应恶劣环境压力测量要求。对合金薄膜压力传感器的工作原理进行了介绍,比较了几种压力传感器的优缺点,并以应用温度范围这一指标为中心论述了镍铬、铂钨及钯铬薄膜压力传感器的性能特点及研究现状。镍铬薄膜传感器适用于中、低温介质压力测量,而铂钨、钯铬薄膜传感器适用于更高温度环境下的压力测量。