多孔复合微结构的制备与减反射性能

摘要

主要研究了多孔-金字塔和多层多孔-金字塔两种多孔复合微结构的减反射性能.多孔-金字塔是将带有金字塔结构的单晶硅片置于HF/Fe(NO3)3溶液中二次化学腐蚀得到的,而多层多孔-金字塔复合微结构是将带有金字塔结构的单晶硅片置于HF/CH3CH2OH溶液中二次电化学腐蚀得到的.用扫面电镜和UV-vis-NIR分光光度计分别分析了这两种复合结构的表面形貌和反射率.结果表明,在400～800 nm波长范围内,多孔-金字塔和多层多孔-金字塔复合微结构的平均反射率分别为5％和2.1％.多孔-金字塔微结构表面的孔洞较大,表面的金字塔有少量的塌陷,但多层多孔-金字塔微结构表面的孔洞细小且覆盖均匀,表面的金字塔基本上保持完好.通过比较,电化学方法制备的多层多孔-金字塔复合微结构的减反射效果要优于采用化学腐蚀制备的多孔-金字塔复合微结构的减反射效果.%The antireflective properties of porous-pyramids and multilayer porous-pyramids are studied. A porous-pyramid antireflective structure is obtained by etching the textured monocrystalline silicon wafer in HF/Fe(NO3)3 solutions. And a multilayer porous-pyramid binary structure is prepared by electrochemically etching the textured monocrystalline silicon wafer in HF/CH3CH2OH solution. The morphologies and reflectance of these two structures are tested by scanning electron microscope (SEM) and UV-vis-NIR spectrophotometer, respectively. Average reflectances of 5% and 2.1% between 400 nm and 800 nm are obtained for porous-pyramids and multilayer porous-pyramids structures, respectively. The SEM results show that the pores on the surface of porous-pyramid structure are large and some pyramids are collapsed. However, the pores on the surface of multilayer porous-pyramid structure are small and the pyramids keep intact. The antireflective properties of multilayer porous-pyramid structure are better than that of the porous-pyramid structure.