模拟浮法在线工艺制备多功能TiN镀膜玻璃

摘要

TiN thin films were prepared by using atmosphere pressure chemical vapor deposition in a small coater.The process was to simulate an on-line coating on float glass to obtain a multifunctional coating glass with ultraviolet-shielding and infrared-reflecting performances.TiCl4 and NH3 were used as precursors.The structural and optical properties of the TiN films were characterized.The results show that the ultravioletshielding property is improved with the flow of NH3 and the ultraviolet shorter than 380nm in wavelength is almost entirely shielded when the NH3 flow achieves 300 sccm.The Drude reflection band in near-infrared region is been narrowed,while its reflectivity increases in higher frequency region.On the other hand,the reflecting ability in near-infrared region increases with the moving speed of glass substrates,while its ultraviolet-shielding ability decreases gradually.%本文模拟浮法玻璃在线CVD镀膜工艺,利用常压化学气相沉积小型镀膜机,以TiCl4和NH3作为反应物前驱体,成功地在玻璃表面镀制一层TiN薄膜,获得了具有高阻隔紫外及反射红外的多功能镀膜玻璃.对其性能进行分析显示:随着反应物NH3流量的增加,TiN薄膜阻隔紫外线的性能逐渐提高,在近红外区的Drude型反射区域有所缩小,但其在高频近红外波段的反射率有所提高.当NH3达到300sccm时,能够完全阻隔低于380nm的紫外线波段,反射红外线效果良好.随着基板移动速率的增大,在一定程度内可以提高薄膜对近红外线的反射能力,但阻隔紫外线的性能逐渐降低.