不同Co底层厚度对FeCo(001)取向的影响

摘要

Co substrates with different thicknesses were deposited on the Si (100 ) substrates by magnetron sputtering method,then FeCo/SiO 2 thin films were prepared by sol-gel spin-coating combined with hydrogen reduction on the Co underlayers.Crystal structure of the samples were tested by X-ray diffractometer,while magnetic properties of the thin films were characterized by vibrating sample magnetometer (VSM).The results show that the crystal orientation of FeCo gradually changes from (110)to (200)with the increase of the thickness of Co underlayers.When the thickness of Co underlayer is 10 nm,the value of I (200)/I (110) is the largest,this indicates that the strongest orientation of FeCo(200) is preferred. At the same time, the in-plane saturation magnetization of the film is maximum,and the coercivity is minimum,so the thickness of Co increases which is beneficial to improve the soft magnetic properties of FeCo/SiO 2 composite films.%用磁控溅射法在Si(100)基片上沉积不同厚度的Co底层,在Co层上先用溶胶-凝胶(sol-gel)法旋涂原始溶液,再经H 2还原获得FeCo/SiO 2薄膜,并用X射线衍射仪测试样品的晶体结构,由振动样品磁强计(VSM)表征薄膜的磁性质.结果表明:随着Co底层厚度的增大,FeCo的晶面取向由(110)逐渐转变为(200);当Co底层厚度为10 nm时,I(200)/I(110)值最大,即FeCo(200)择优取向最强,同时薄膜平行膜面的饱和磁化强度最大,矫顽力最小,即Co厚度增加有利于改善薄膜的软磁特性.