迈克尔逊干涉微小尺度测量系统的研究

摘要

A micro-scale measurement system based on Michelson interferometer is designed.The system can transform the micro scale of the measurement object into the change value of movable holophote,take use of photovoltaic cells to transform light signals into electrical signals.Through signal acquisition,the data were processed by microcontroller and the results were showed by liquid crystal display.The measurement results of standard feeler demonstrate that,the system has the properties of high accuracy,easy operation,fast measurement and so on.%设计了一款能够进行微小尺度测量的系统。该系统是在迈克尔逊干涉仪的基础上,对其加以改装,使其能够将待测物的微小尺度转化为可移动全反镜的改变量。利用光电池将光信号转化为电信号,并通过信号采集,由单片机进行数据处理并将测量结果用液晶显示。对标准塞尺的测量结果显示,该系统具有精确度高、操作简便、测量迅速等优点。