工作距离和探头选择对FESEM图像质量影响探析①

摘要

为了探讨不同工作距离下考察探头和样品的相对位置的选择对最后测试结果的影响,以泡沫镍及介孔二氧化硅小球这两种典型样品为例,通过变换探头及电镜参数的方法,进行了对比研究.分析结果表明:工作距离越大,分辨率不一定越差.旨在为电镜测试中工作距离和探头选择提供参考依据.%In order to explore the influence of the choice of relative positions of probe and sample under different working distances on the final test results, two typical samples, nickel foam and malodorous silica pel‐let, were taken as examples and the comparative study was conducted by changing the parameters of probe and e‐lectron microscope . The results show that the higher the working distance, the resolution is not necessarily worse . The purpose of this paper is to provide reference for the selection of working distance and probe in electron mi‐croscope test.