利用计算机对不同运动轨迹下ZnS头罩外表面膜厚分布进行了模拟,优化出头罩的最佳运动轨迹,在该轨轨迹下采用射频磁控反应溅射(RRFS)法进行头罩镀膜,能够得到满足使用要求的薄膜厚度均匀性.实验结果表明,头罩外表面薄膜厚度不均匀性小于10%，双面镀膜后,8～11.5μm波段平均透过率从69.6%提高到87.2%以上,透过率的不均匀性小于1.2%,满足了红外应用中对ZnS头罩的要求.%Antireflective and protective films consisted of GexC1-x films were prepared by reactive radio frequency magnetron sputtering (RRFS) on ZnS dome. A computer was used to simulate the thickness distribution of the film of ZnS dome for different movement tracks, and the best one was got by using the best dome movement track. The thickness uniformity of films could meet the application requirement when films were deposited by RRFS on the dome. The computer control system was built according to the simulation results, and antireflective and protective films consisted of GexC1-x films were deposited on the ZnS dummy dome. The results show that 1) the variation of thickness is lower than 10%, 2) the average transmittance, in the 8～11.5μm waveband, is raised from 69.6% to above 87.2% after the films are coated on double sides, 3) the average transmittance variation is less than 1.2%. Thus the requirements of ZnS dome in infrared application are met.
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