标准数字 CMOS 工艺正交压控振荡器设计∗

摘要

正交压控振荡器是高速链路中的一个关键部件.片上集成高质量品质的电感电容等无源器件是影响压控振荡器性能的关键因素.为了兼容传统的数字工艺,采用超深亚微米的数字 CMOS 工艺进行片上电感电容的集成,并基于此无源器件实现了基于电容耦合的正交压控振荡器,实现中心频率16.12 GHz,频率调节范围为10%,1M 频偏处的相位噪声为-112 dBc,相位误差小于0.39°.%Quadrature VCO is one of the key components in high speed data link.High Q on-chip in-ductance and capacitance integration is a key fact,which highly affects the performance of Voltage Con-trolled Oscillator.In order to fully compact the traditional digital CMOS process,we have designed on-chip inductance and capacitance with ultra-deep submicron digital CMOS process,based on which a capaci-tive coupling quadrature VCO is implemented.According to the simulation,the center frequency of QVCO is 1 6.12GHz,with 10% frequency tuning range,-1 12dBc@ 1MHz phase noise and 0.39°phase error.