亚波长金属光栅光刻条纹分布

摘要

亚波长金属光栅表面等离激元( SPP)具有光场局域增强、异常透射等现象，被广泛用于光刻。利用FDTD Solutions软件，改变金属光栅材料、周期、厚度等因素，通过有限时域差分方法探究表面等离共振光刻条纹分布特点。仿真结果表明，亚波长金属光栅光刻条纹分布周期是光栅的周期一半，光刻条纹强度在表面等离共振波长作用下也会大于入射光强度。该研究为微纳米光学器件的设计提供了依据。%Sub-vavelength metallic gratings has been widely used in lithography based on extraordinary transmission efficiency and local field enhancement. In order to deeply understand SPPs striped distribution period, we adjusted the materials , period , thickness of metallic gratings ,used Finite-Difference Time-Domain method in Lumerical FDTD Solutions computer software. The numerical results show that lithography striped resolution was half of gratings periods,and intensity of photoresist was greater than the incident light under SPPs wavelength.It is believed that this study will provide useful information for furtherdesigning micro-ano optical elements.