The nanoporous gold film was synthesized by free corrosion dealloying Cu-Au-Ag precursor in the dissimilar acid solutions.The Cu, Au and Ag were prepared by magnetron sputter, respectively.The ternary Cu-Au-Ag precursor was an alloy of Cu, Au and Ag alloyed during the anneal process.Scanning electron microscope and energy dispersive analysis of X-ray are used to analyze the micro-structure and composition of the sample before and after dealloying.The results indicate that the Au3Ag28.5Cu68.5 alloy precursors formed at the condition of 400 ℃ heat-treatment for 36 h.The nanoporous Au/Ag sample was obtained after the selective corrosion in the FeCl3+ HCl solutions.The increase concentration of HNO3 is useful for preventing the surface cracking forming.The nanoporous gold samples with three-dimensional networks, ligament size of 10-35 nm, porosity of 84% were obtained.%采用磁控溅射镀铜金银多层膜,经过长时间高温热处理合金化制备前驱体三元合金,以不同的酸溶液自由腐蚀去合金化去除合金中的铜元素和银元素,成功制备出纳米多孔金薄膜.采用扫描电镜和X射线能谱仪对去合金腐蚀前后样品的形貌和成分进行了分析.结果表明,400 ℃,36 h热处理后铜金银多层膜完全合金化,获得了Au3Ag28.5Cu68.5合金材料;FeCl3+HCl溶液自由腐蚀去除铜可获得连续均匀的纳米尺寸孔隙结构,获得了几乎不含铜的样品;采用渐进浓度的硝酸自由腐蚀去合金化后去除银后获得了孔隙率约84%的纳米多孔金薄膜,其微观结构为连续的三维多孔结构,其系带尺寸10~35 nm,并且20~25 nm的系带分布达77%.
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