A semitransparent A-Si thin film solar cell is composed of a highly conductive transparent TCO /Ag film back e-lectrode and a special designed ZnO/TiO2 antireflection film which is used to compensate the decrease in back electrode reflection light absorption .The experiment shows that with 10~15 nm thickness Ag film and 200~300 nm AZO film as back electrode and ZnO (65 nm in thickness)/TiO2(50 nm in thickness) antireflection film, the new semitransparent A-Si thin film solar cell can get 39.76 W output power and 20.17 %transmittance in average , while the traditional semitransparent solar cell gets 35.3 W output power at 20.07 %transmittance in average .%利用一种半透明非晶硅薄膜太阳能电池采用高导电性能的透明银( Ag)薄膜和TCO薄膜组成透明的背电极代替了普通的不透明铝背电极,通过ZnO/TiO2薄膜组成复合增透膜提升入射光能,弥补透明背电极的背反射减弱问题。实验采用磁控溅射法制备厚度为10~15 nm的银薄膜与200~300 nm厚度AZO薄膜为透明背电极,采用厚度为65 nm的ZnO薄膜和50 nm的TiO2薄膜为增透膜,制备的电池样品平均输出功率为39.76 W,透光率为20.17%,对比相同电池工艺的传统半透明非晶硅薄膜太阳能电池组件,有效地减少了光损失,提高了电导率。
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