Monte Carlo方法计算定量俄歇电子能谱分析中的背散射因子

摘要

Using a Monte Carlo simulation method a novel calculation on the backscattering factor in quantitative Auger electron spectroscopy (AES) analysis has been performed, for Ni L3 VV and Pt M5 N67 N67 Auger excitation as examples. Up-to-date advances in the related fields have been considered in the calculation, leading to more accurate results for quantitative AES analysis.%本文通过Monte Carlo方法模拟计算了定量俄歇电子能谱分析(如对Ni的L3VV俄歇电子和Pt的M5N67N67俄歇电子)中的背散射因子.由于计算中结合了相关领域的各种最新进展,因此该新计算可以为定量俄歇电子能谱分析提供更为准确的参数.