光刻物镜波像差检测平台针孔对准装置的研制

摘要

针对光刻物镜波像差检测平台上的针孔定位的需求,设计了一种并联式二维微定位机构,并对该装置的结构特点进行了讨论.该结构具有良好的自解耦功能和较低温度敏感度.并通过有限元方法对针孔定位装置在受力状态下的变形情况进行了模拟,并进行了模态分析,证实了该针孔定位装置具有的特性能够很好地满足光刻物镜波像差检测的针孔定位需求.%Based on the requirement of pinhole positioning of the wavefront aberration detecting stage for lithographic projection objective, a parallel two—dimensional micro—positioning mechanism was designed. And the structural character-istics of the device were discussed. The structure has a good self—decoupling function and a lower sensitivity to temper-ature. The deformation of pinhole positioning device was simulated by the finite element method, and modal characteris-tics were also analyzed. The result confirmed that this device can well meet the requirement needs of the pinhole posi-tioning of the wavefront aberration detecting stage for lithographic projection objective