透镜中心厚度测量方法及装置的研究

摘要

基于光学共焦法测量透镜厚度的原理，设计一套快速、非接触、高精度的透镜中心厚度测量系统，并与二维移动平台机械配合。测厚系统在计算机控制下，按具体算法进行分析，最终测量出透镜的中心点。实验结果表明，本系统的测量范围不小于15mm，测量精度±1μm，满足透镜中心厚度测量精度的要求，可以有较为广泛的应用。%Based on the principle of optical confocal measurement to the lens thickness,which working in a set of fast、non-contact、high-precision measurement of the lens center thickness measuring system was designed with the two-di-mensional mobile platform machinery. Under computer control,the measurement system is analyzed by the specific algo-rithm,and the final measurement of the center point of the lens. Experimental results show that the measurement range of the present system is not less than 15mm,the measurement accuracy of±1μm,to meet the requirements of the mea-surement accuracy of the thickness of the center of the lens,it can be more widely used.