双面光学共焦技术的透镜中心厚度测量设计

摘要

For the existing measurement system of lens center thickness based on optical confocal technology, refraction and reflection of incident light affected the measuring accuracy. In order to solve this problems, based on confocal technology, the modified measurement system of lens center thickness was designed with the method of double-side optical confocal measurement. After theoretical analysis, error analysis and experimental verification, the results show that the measurement range of the system reaches 30mm and the measurement accuracy is 2μm. The system can get the high-speed untouched measurement of center thickness and satisfy the demands of actual measurement.%基于共焦法测量透镜中心厚度的装置中,需要光进入透镜内部发生折射和反射,但这会影响测量精度。为了解决这一问题,在共焦法原理的基础上,采用双面光学共焦的测量方法,设计了一套透镜中心厚度的测量装置,并进行了理论分析、误差分析和试验验证。结果表明,该装置测量范围能达到30mm,测量精度为2μm。该装置实现了对透镜中心厚度的高速非接触测量,完全能达到实际测量的需要。