光栅信号相位补偿

摘要

As a means of high-resolution measurements, the grating measurement technology is drawing more and more attention as the development of ultraprecision machining technology. In this paper a new method of phase detection and compensation was proposed. In order to improve the resolution of the grating sensor and reduce the subdivision error, CORDIC algorithm is used mainly to detect the phase of the two channels and their phase deviation is obtained. Under the vector mode in this method. Under the rotation the phase deviation is compensated. Because only basic plus and shift operations are used in the whole process, the hardware implementation is very easy.%　　光栅测量技术作为高分辨率测量的一种手段，随着超精密加工技术的发展受到人们越来越多的关注。本文提出了一种新的处理方法用于检测和补偿相位，提高光栅传感器的分辨率，减少了细分误差。该方法主要使用向量模式下的CORDIC算法对两路信号的相位进行检测，并获得其它们之间的相位偏差。再用它的旋转模式，补偿相位偏差信号。整个过程只用到基本的加法和移位操作，易于硬件实现。