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Encoder having a detection head with a reference detection receiving grating and a phase compensation receiving grating
Encoder having a detection head with a reference detection receiving grating and a phase compensation receiving grating
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机译:具有带有参考检测接收光栅和相位补偿接收光栅的检测头的编码器
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摘要
In a scale, a reference detection pattern and a displacement detection pattern are formed. A detection head outputs a reference detection signal, a phase compensation signal, and a displacement detection signal. A signal processing unit generates a reference signal by amplifying one or both of the phase compensation signal and the reference detection signal and adding up them, and detects a position of the detection head relative to the scale. A combined light receiving grating includes a reference detection light receiving grating and a phase compensation light receiving grating disposed so as to be shifted from the reference detection light receiving grating in the measurement direction. A combined light receiving element includes a reference detection light receiving element configured to output the reference detection signal and a phase compensation light receiving element configured to output the phase compensation signal.
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