一种高精度小孔圆度检测方法研究

摘要

介绍了一种用于短小孔内表面圆度检测方法。提出基于激光共焦测距原理，应用旋转反射镜转化并消除径向跳动误差及传感器振动误差的新技术。成功地检测了标准孔径表面圆度，实验结果表明，该方法可以使小孔圆度检测误差不大于0.3μm，大大提高了小孔圆度检测的精度。%In this paper,a method for the short hole surface roundness detection method is introduced. The new tech-nology based on laser confocal ranging principle is proposed, whcih applies the rotating mirror into to transform and eliminate the diameter jump error and sensor vibration error. The surface roundness of standard aperture is detected suc-cessfully. The experimental results show that the hole roundness detection error can be less than 0.3μm and the detec-tion accuracy of hole roundness is greatly improved.