一种球面透镜波前畸变的绝对检测方法

摘要

The transmission wavefront distortion of spherical lens is an important factor influcing the light beam quality for high power laser drivers.The precision of spherical lens wavefront measured by Fizeau interferometer is limited by the precision of standard spherical lens and the rear flat.However, the existing absolute testing method applies to reflecting element only.To remove the error of standard spherical lens and the rear flat and improve the test precision of spherical lens transmission wavefront, an absolute method,three position-shifting method, was proposed.The principle of this method was introduced in detail, the simulation and the verified experiment were performed.The simulation results show that the simulation error is 10 nm~13 nm,meeting the theorotical requirement of high-precision measurement;Experiment results show that in spherical lens wavefront measurement, three position-shifting method can effectively reduce the influence of standard spherical lens and rear flat on the measurement results.This method has a good guidance for processing and alignment of spherical lens.%球面透镜的透射波前畸变是影响激光驱动器光束质量的重要参数.采用移相干涉仪检测球面透镜波前畸变时,测量结果的精度受限于标准球面镜头和后置平面反射镜的精度.然而,现有的绝对检测技术仅适用于反射元件.为了满足球面透镜波前畸变的高精度检测需求,提出了一种适用于球面透镜透射波前的绝对检测方法:三位置-平移相减法.详细介绍了三位置-平移相减法的原理,对其进行了模拟仿真和实验验证.仿真结果显示:三位置-平移相减法的仿真误差为10 nm~13 nm,达到高精度测量的理论要求;实验结果表明:三位置-平移相减法可以有效地减小前标准球面镜头和后置平面反射镜对测量结果的影响,该方法对球面透镜的加工和装调具有很好的指导意义.