基于二维振镜的多光谱集成靶标设计及应用

摘要

In order to improve detection precision based on optical axis parallelism of two-dimensional galvanometer and simplify measurement procedure,a multi-spectral integrated target based on two-dimensional galvanometer scanning system is designed.Through integration of multi-spectral target plate and LED lighting source,problems of frequent replacement,repeat ed adjustment of target plate and light source in a special target are solved.Centering accuracy of CCD detection method is improved by using two-dimensional galvanometer,and Cassegrain collimation system with optimized aberration is used to improve quality of cross-sectional imaging.With optical axis parallelism test,calibration accuracy of multi spectral integrated target reaches 0.10mard,which meets requirements of high precision and automatic detection of optical axis parallelism of multi-spectral opto-electronic systems.%为了提高基于二维振镜光轴平行性检测方法的检测精度,简化测量操作步骤,设计了一种基于二维振镜扫描系统的多光谱集成靶标.通过多光谱集成靶板与LED照明光源结合,解决一靶专用中需要频繁更换、反复调校靶板及光源的问题.利用二维振镜进行十字分划中心对准,提高CCD检测方法的测量精度;采用像差优化的卡塞格林准直系统,改善十字分划成像质量.通过光轴平行性检测实验,多光谱集成靶标校准精度达到了0.10 mard,该精度满足多光谱光电系统光轴平行性高精度和自动化检测的要求.