Research on the temperature characteristic of Love wave device with structure of multi-waveguides used for gas sensor

摘要

This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability.The theoretical model dealing with the Love wave propagation in multi-waveguides was established first,the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions.Combing with the dispersion characteristics and Tomar's method,the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted,and confirmed by the following experimental results.Excellent temperature coefficient of the Love wave device with SU-8/SiO_2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃,which agrees well with the calculated results.The optimized Love wave device is very promising in gas sensing application.