基于飞秒激光的表面微纳加工技术综述与展望

摘要

The ultrashort pulse width and superstrong peak power of femtosecond laser have been widely concerned and applied in the micro-nano fabrication field .The application status of femtosecond laser is reviewed since it comes into being , and the interaction mechanism between materials and femtosecond la-ser is described according to different processing objects (metal, transparent materials and polymer ).The surface micro-nano fabrication technology of femtosecond laser is summarized in three aspects:laser abla-tion, two-photon polymerization , femtosecond laser micro-nano fabrication system .Finally, the potential problems and prospectives are discussed .%飞秒激光脉冲宽度超短、峰值功率超强，在表面微纳加工领域得到了广泛的关注和应用。简述了飞秒激光诞生至今的应用概况，然后依据不同的加工对象（金属、透明材料、聚合物）阐述了飞秒激光与其相互作用的机理，从激光烧蚀、双光子聚合加工、飞秒激光微纳加工系统3方面对飞秒激光表面微纳加工技术进行了综述，最后探讨了待解决问题并进行了展望。