基片氧化层对纳米FeCo/SiO2复合薄膜结构和磁性的影响

摘要

FeCo/SiO2 nanocomposite films were prepared on Si substrates by sol-gel and spinning combining with hydrogen reduction.The influences of the substrates oxide layer on the microstructure and magnetic properties of the sample films have been investigated using X-ray diffraction（XRD） and vibrating sample magnetometer（VSM）.The results show that the oxide layer on the substrates plays the role of protecting layer,preventing the interaction between Si and Fe atoms to form FeSi2 phase.The sample films obtained on the substrates with oxide layer have higher degree of crystallization and better soft magnetic properties with lower coercivity and higher saturation magnetization.%采用溶胶-凝胶旋涂法结合氢气还原工艺,在Si基片上制备了纳米FeCo/SiO2复合薄膜,利用X射线衍射仪（XRD）和振动样品磁强计（VSM）对样品进行了测试分析,研究了基片氧化层对薄膜样品微观结构和磁性能的影响.结果表明,基片表面的氧化层起到较好的隔离作用,防止了Si与Fe发生反应,提高了FeCo的晶化程度,增大了薄膜饱和磁化强度,降低了薄膜矫顽力,有利于复合薄膜软磁性能的提高.