螺旋极板电容式传感器的特性研究和参数优化

摘要

For the deficiencies of traditional capacitive sensors, a novel helical shaped surface plates capacitive transducer was put forward. The finite element method was used to analyze the effects of the structural parameters on the sensor capacitance and sensitive field with the software MATLAB. Results showed that the homogeneous error of the sensitivity distribution in the sensing field was less than 4% by using optimum design,which made the measurement results insensitive to phase distribution and flow regime changes. The soft field of the capacitance transducer was significantly improved.%针对传统电容式传感嚣的不足,构建了一种改进型螺旋表面极板电容式传感器.采用二维有限元和MATLAB 相结合的方法,分析了电极参数对传感嚣输出电容和灵敏度的影响,并进行了优化设计.优化后的传感器灵敏场均匀性误差小于4％,显著地改善了传感嚣的软场效应,有效地减少了流型和相分布对测量结果的影响.