The Al/Ni exploding foil was successfully fabricated by traditional MEMs technology. The electrical performance of Al/Ni exploding foil was investigated under 4kV voltage. It is found that the maximum energy transformation efficiency comes to 18%, which is higher than that of Cu exploding foil. The phenomenon of short exploding time, low electrical energy, and concentrating output energy was showed for Al/Ni multilayer foil. Meanwhile, the flyer velocity is increased by improving input voltage and foil thickness, and the flyer velocity comes to 3 100m/s under 5kV voltage and 3μm thickness of Al/Ni.%利用传统的MEMs工艺成功制备出Al/Ni复合爆炸箔,在4kV的充电电压下研究其电爆性能。研究表明,相比于传统的铜爆炸箔,复合爆炸箔的能量利用高,可达18%,而且爆发提前,所需能量较小,爆发能量集中。飞片速度研究表明,爆炸箔的厚度和充电电压会影响飞片的最终速度,飞片的速度随爆炸箔的厚度和电压升高而增大。当爆炸箔的厚度为3μm、充电电压为5kV时,飞片的速度可达3100m/s。
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