多晶硅棒对还原炉径向热辐射的角系数计算与分析

摘要

根据多晶硅还原生产中不同的还原炉炉型、硅棒直径和排列的几何结构,采用Matlab软件编程,计算硅棒对还原炉径向热辐射的角系数.并根据获得的角系数,对还原炉径向辐射功率和还原单位径向热辐射量进行了分析和比较,为多晶硅还原炉的设计和生产操作提供理论支持和数据参考.%By Matlab software programming,the angle coefficient of the silicon rods thermal radiation to the Siemens CVD reactor's wall is calculated,based on the different diameter and the geometric alignments of the silicon rods,of which the diameter is increasing as reaction time prolonging.According to the obtained angle coefficient values,the radial radiation power of the rods to the reactor's wall,and the energy consumption per unit silicon of radial radiation are analyzed and compared.This paper can provide theoretical support and data reference for equipment design and process operation of the CVD reactors.