高线密度X光透射光栅衍射效率

摘要

高线密度X光透射光栅是各种高分辨光栅摄谱仪的核心色散元件,为了获得较高的光谱分辨率,工作在2～5 keV能区的光谱仪需要使用5000 l/mm的X射线透射光栅.为了获得光栅的绝对衍射效率,采用同步辐射光在多个能点对5000 l/mm的X光透射光栅进行衍射效率实验标定,通过光栅相对衍射效率拟合获得了光栅结构参数,与光栅结构测量结果非常接近.然后,采用衍射效率的矩形栅线模型,计算得到了光栅的绝对衍射效率.%X-ray transmission gratings with high line-density are key components of various high-resolution spectrometers. X-ray transmission gratings with 5000 l/mm are needed to diffract X-rays at 2. 0-5. 0 keV. To obtain the absolute efficiency of the 5000 l/mm gratings made domestically, the intensity ratio of diffraction peaks was experimentally measured for different energy X-rays radiated from the synchrotron radiation source. The duty cycle fitted by measured data was consistent with that obtained by the electron scanning microscope. Finally, the absolute diffraction efficiency was calculated via the rectangle cross-section model.