基于PⅢ技术的高真空洁净环境中润滑问题

摘要

In order to improve the lubrication of movement mechanism in final optics assembly, the plasma immersion ion implantation (PHI) technology is used to modify mechanical properties of work pieces with complex shape. The combination of suitable parameters can largely increase the hardness and wear resistance of material surfaces. The verification test was made by modifying the mechanical properties of the bearing inner race and bearing outer ring. Furthermore, the dimensional accuracy and the surface roughness of sample work pieces modified by PHI technology can maintain consistence with those of untreated pieces. The work sufficiently certificates that the PHI technology can amend the mechanical properties of work pieces and elongate the life length of movement mechanism kinematic accuracy.%针对高洁净的真空环境下终端光学组件内运动机构的润滑问题,采用等离子体浸没离子注入(PⅢ)技术对复杂形状的零件进行表面改性,通过轴承内外圈表面改性前后的对比实验分析,结果表明,通过对注入元素、剂量和能量的选择,可以大幅度提高材料表面的硬度及耐磨性,并且零件的尺寸精度及表面粗糙度保持性好,充分证明了PⅢ技术可以在满足颗粒洁净度和有机物洁净度的双重要求条件下,提高运动部件抗摩擦磨损性能,延长微驱动机构的运动精度寿命,是解决终端光学组件中润滑问题的有效途径.