热处理对CH薄膜表面粗糙度及力学性能的影响

摘要

The glow discharge polymer (GDP)films with the thickness of about 7μm were deposited.Under the protection of argon,the GDP films were heated to 300 ℃ for 6 h,10 h,24 h.The influence of holding time on the structure of GDP films was characterized by FT-IR.The surface roughness of GDP films after different holding time was investigated by white light in-terferometer.The hardness and modulus of GDP films were measured by nanoindentation.It is found that while the holding time increases,the relative content of CH3 decreases,the cross-linking degree of carbon network increases,and the surface roughness of GDP films reduces.The hardness and moludus decreases firstly and then increases with the increaseing holding time.%利用低压等离子体化学气相沉积法制备厚度约为7μm 的辉光放电聚合物薄膜,将制备的薄膜样品放入通有氩气保护的热处理炉中加热至300℃,分别进行6,10,24 h 的保温热处理。通过白光干涉仪观察分析了不同保温时间下辉光放电聚合物薄膜的表面粗糙度；利用傅里叶变换红外吸收光谱分析了300℃条件下不同保温时间对薄膜结构的影响；采用纳米压痕仪表征了不同保温时间热处理后,薄膜硬度及模量的变化。结果表明：随着保温时间的增加,薄膜的表面均方根粗糙度由12 nm降至4.43 nm。薄膜结构中甲基的相对含量减少,双键的相对含量增加,碳链变长,同时薄膜网络结构的交联化程度增强。硬度和模量随着保温时间的增加先减小后增大。